I'm currently using X2Y caps from Johanson for decoupling, on the same laye=
r as the MPU, with as short a track as physically possible.  VCC comes up f=
rom a plane layer below the processor outboard of the caps and passes throu=
gh the caps.

That said, for most applications, adding a via's worth of inductance probab=
ly isn't an issue in most applications.  Might pay to minimize the via indu=
ctance and make sure the series resonant point with the cap isn't going to =
do anything interesting.


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