The ones we are evaluating and trying to control are electrostatic. Isaac On 22/12/2014 20:16, Harold Hallikainen wrote: > By the way, what is the mechanism that causes movement in MEMS? Is it > piezo, electrostatic, something else? > > Harold > > > > --=20 http://www.piclist.com/techref/piclist PIC/SX FAQ & list archive View/change your membership options at http://mailman.mit.edu/mailman/listinfo/piclist .